Silicon

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Silicon

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Orbitals and Energies #

Note – these are listed in BINDING ENERGY

 

Si 2p ≈ 100 eV

Si 2s ≈ 150 eV

Si 1s ≈ 1840 eV (HAXPES)

SiO2 Survey With Peak Markers for Si

Doublet Separations #

Si 2p = 0.6 eV

XPS of Si 2p with doublet separation

Common Overlaps for Si 2p #

Fe 3s – Ag 4s – Co 3s – La 4d – Sb 4p – Hg 4f – Pt 5s – Ga 3p – U 5d – Po 5p – Br LMM (Al Ka X-rays)Al KLL (Al Ka X-rays)

Si overlaps

Auger Energies #

Note – these are listed in KINETIC ENERGY

 

Si LMM ≈ 93 eV

Si KLL ≈ 1610 eV (HAXPES)

Common Binding Energies – Si 2p #

Species #

B.E. / eV #

Charge Ref #

Reference #

Si

99

Au 4f (83.94 eV)

SiO2

103.5

Au 4f (83.94 eV)

SiC

100.5

Au 4f (83.8 eV)

Theory and Background #

Silicon is extensively studied by XPS due it’s effectiveness as a substrate and the versatility of the oxide as a catalyst support. The 2p region is the major emission where there is a small doublet separation (0.6 eV) and the oxidised form of silicon may exhibit a larger FWHM than that of the elemental form. Silicon 2s peaks are also relatively large, and may be of use where Si 2p overlaps with another emission.

Si 2p region of SiO2 overlayer on Si substrate(1)
Si 2s region(1)

Experimental Advice #

Silicon has extensive plasmon structure, and it may be helpful to record both emissions in one sweep to help with backgrounds for overlapping elements, particularly those at low concentration, or with weak emissions, such as boron.

Data Analysis Guidance #

Due to the small spin-orbit splitting (0.6 eV), and the breadth of oxidic peaks, it is not uncommon to fit only a single peak for oxide / native oxide layers for Si 2p.

Si native oxide fitting

Reference Datasets #

 

Coming soon

References #

  1. Data acquired by HarwellXPS
  2. Jensen, D. S., et al. (2013). “Silicon (100)/SiO2 by XPS.” Surface Science Spectra 20(1): 36-42. Read it online here.
  3. Miyoshi, K. and D. H. Buckley (1982). “XPS, AES and friction studies of single-crystal silicon carbide.” Applications of Surface Science 10(3): 357-376.. Read it online here.