In XPS fitting, we make use of relative sensitivity factors to quickly and easily calculate atomic percentages from peak intensities in our spectra.

Where:

At% = I / RSF

This allows us to perform quick and easy integrations and chemical composition measurements.

The component A in the aforementioned equation related to instrument specific geometric factors.

Geometric factors in X-ray photoelectron spectroscopy (XPS) refer to how the spatial arrangement and angles between the sample, X-ray source, and electron analyser influence the measured photoelectron intensity. These factors are crucial for both maximizing signal and ensuring accurate quantification.

Key geometric factors include:

• Take-off angle: The angle between the sample surface and the path to the analyser. Changing this angle affects the escape depth of detected electrons and thus the surface sensitivity of the measurement. A smaller take-off angle increases surface sensitivity but reduces overall intensity.

• X-ray incidence angle: The angle at which X-rays strike the sample can change the photoelectron yield; a grazing incidence can increase signal from the surface layers.

• Analyzer solid angle and collection area: The sizes of the area from which electrons are collected and the acceptance angle of the analyser influence how much of the emitted photoelectron flux is detected.

• Distance between sample, source, and detector: Shorter distances increase collection efficiency but may also introduce more geometric shading or non-uniformity effects.