Exporting your quantification data into EXCEL or similar is a straightforward process in CasaXPS. If you have created regions and you want to export your chemical quantifications, highlight all of the blocks you wish to export and open the ‘Quantify’ window, and select the ‘Report Spec.’ tab. Note, if you have added regions to both survey and high resolution scans, you should only select one or the other. Selecting both will combine the quantification and affect your data.

From here, you can select ‘Regions’ from the standard report box and this will open a new window with your quantification.

You then have an option at the top toolbar called ‘Copy’, which will open a new window and allow you to select what you wish to copy to the clipboard.

You can do the same process for components, by selecting comps instead:

When handling multiple samples, the ‘Custom Report’ option exports a more helpfully formatted table of atomic percentages. Simply highlight all of the blocks you wish to export, go to the ‘Report Spec.’ tab of ‘Quantify’, and click ‘Comps’ in the custom report section.

From here, you can select ‘Area’ or ‘Height’ report to get the quantification of your data based on each of these methods.

TAGs can be used to modify the data recorded in a custom report. Select ‘Set TAGs’ in the ‘Report Spec’ tab of the quantify window, and highlight all blocks you want to export. Select the TAGs to use and click OK to set these for all components and regions. Now if you select customs reports, TAG defined report, you can generate the data you require.

Once you have modified your fits to an appropriate style, you can export or save images as a vector or image file. To copy as an image, select the ‘Copy’ option on the top toolbar. To copy as a vector file, select ‘Copy as EMF’. To save as a vector file, select ‘Save Picture’.

To export your processed data (including fitted lineshapes) to plot in EXCEL or Origin, select the ‘Copy to clipboard’ option on the top toolbar. This will open a new window to select your copy area.